No.	Part No.	Machine
(No. 1-4)	1	12U3-001	ESEC 2006
	2	12C3-001	ESEC 2006
	3	12D3-001	ESEC 2006
	4	12E3-001	ESEC 2006
(No. 5-8)	5	12U3-030	ESEC 2007
	6	12C3-030	ESEC 2007
	7	12D3-030	ESEC 2007
	8	12E3-030	ESEC 2007
(No. 9-12)	9	12U3-002	ASM
	10	12C3-002	ASM
	11	12D3-002	ASM
	12	12E3-002	ASM
(No. 13-16)	13	12U3-006	Shinkawa
	14	12C3-006	Shinkawa
	15	12D3-006	Shinkawa
	16	12E3-006	Shinkawa
(No. 17-20)	17	12U3-008	Alphasem
	18	12C3-008	Alphasem
	19	12D3-008	Alphasem
	20	12E3-008	Alphasem
(No. 21-24)	21	12U3-013	KS 6300
	22	12C3-013	KS 6300
	23	12E3-013	KS 6300
	24	12D3-013	KS 6300
(No. 25-28)	25	12U3-007	KS 6100
	26	12C3-007	KS 6100
	27	12E3-007	KS 6100
	28	12D3-007	KS 6100
(No. 29-32)	29	12U3-009	K. Matsushita
	30	12C3-009	K. Matsushita
	31	12E3-009	K. Matsushita
	32	12D3-009	K. Matsushita
(No. 33-36)	33	12U3-012	Nichiden
	34	12C3-012	Nichiden
	35	12E3-012	Nichiden
	36	12D3-012	Nichiden

Page 2

No. Part No. Machine (No. 1-4) 1 12C3-026 K. Matsushita 2 12D3-026 K. Matsushita 3 12E3-026 K. Matsushita 4 12U3-026 K. Matsushita (No. 5-8) 5 12C3-031 Toshiba 6 12D3-031 Toshiba 7 12E3-031 Toshiba 8 12U3-031 Toshiba (No. 9-12) 9 12C3-034 Zevatec 10 12D3-034 Zevatec 11 12E3-034 Zevatec 12 12U3-034 Zevatec (No. 13-14) 13  12C3-156 MSRI 14 12U3-156 MSRI (No. 15-16) 15 12C3-232 Datacon 16 12U3-232 Datacon     (No. 17-19) 17 12C3-313 Huges 18 12E3-313 Huges 19 12U3-313 Huges 20 12C3-xxx Specify 21 12D3-xxx Specify 22 12E3-xxx Specify 23 12U3-xxx Specify